diff --git a/Source/cmGeneratedFileStream.cxx b/Source/cmGeneratedFileStream.cxx
index 0a7bab059..d6a157a03 100644
--- a/Source/cmGeneratedFileStream.cxx
+++ b/Source/cmGeneratedFileStream.cxx
@@ -150,7 +150,11 @@ void cmGeneratedFileStreamBase::Open(const char* name)
 
   // Create the name of the temporary file.
   this->TempName = name;
+#if defined(__VMS)
+  this->TempName += "_tmp";
+#else
   this->TempName += ".tmp";
+#endif
 
   // Make sure the temporary file that will be used is not present.
   cmSystemTools::RemoveFile(this->TempName.c_str());
diff --git a/Source/cmLocalUnixMakefileGenerator3.cxx b/Source/cmLocalUnixMakefileGenerator3.cxx
index f92ff868b..df8a80f6b 100644
--- a/Source/cmLocalUnixMakefileGenerator3.cxx
+++ b/Source/cmLocalUnixMakefileGenerator3.cxx
@@ -2158,7 +2158,11 @@ cmLocalUnixMakefileGenerator3
 {
   std::string dir = cmake::GetCMakeFilesDirectoryPostSlash();
   dir += target.GetName();
+#if defined(__VMS)
+  dir += "_dir";
+#else
   dir += ".dir";
+#endif
   return dir;
 }
 
diff --git a/Source/cmTarget.cxx b/Source/cmTarget.cxx
index 851dfe809..cea61f67c 100644
--- a/Source/cmTarget.cxx
+++ b/Source/cmTarget.cxx
@@ -930,7 +930,11 @@ std::string cmTarget::GetSupportDirectory() const
   dir += cmake::GetCMakeFilesDirectory();
   dir += "/";
   dir += this->Name;
+#if defined(__VMS)
+  dir += "_dir";
+#else
   dir += ".dir";
+#endif
   return dir;
 }