diff --git a/Modules/CMakeDetermineASMCompiler.cmake b/Modules/CMakeDetermineASMCompiler.cmake
index 1adfadbb7..247de6f7b 100644
--- a/Modules/CMakeDetermineASMCompiler.cmake
+++ b/Modules/CMakeDetermineASMCompiler.cmake
@@ -167,7 +167,7 @@ set(_CMAKE_ASM_COMPILER_ENV_VAR "${CMAKE_ASM${ASM_DIALECT}_COMPILER_ENV_VAR}")
 
 # configure variables set in this file for fast reload later on
 configure_file(${CMAKE_ROOT}/Modules/CMakeASMCompiler.cmake.in
-  ${CMAKE_PLATFORM_INFO_DIR}/CMakeASM${ASM_DIALECT}Compiler.cmake IMMEDIATE @ONLY)
+  ${CMAKE_PLATFORM_INFO_DIR}/CMakeASM${ASM_DIALECT}Compiler.cmake @ONLY)
 
 set(_CMAKE_ASM_COMPILER)
 set(_CMAKE_ASM_COMPILER_ARG1)
diff --git a/Modules/CMakeDetermineCCompiler.cmake b/Modules/CMakeDetermineCCompiler.cmake
index 1ae84eefe..0d47a60a9 100644
--- a/Modules/CMakeDetermineCCompiler.cmake
+++ b/Modules/CMakeDetermineCCompiler.cmake
@@ -186,6 +186,6 @@ endif()
 # configure variables set in this file for fast reload later on
 configure_file(${CMAKE_ROOT}/Modules/CMakeCCompiler.cmake.in
   ${CMAKE_PLATFORM_INFO_DIR}/CMakeCCompiler.cmake
-  @ONLY IMMEDIATE # IMMEDIATE must be here for compatibility mode <= 2.0
+  @ONLY
   )
 set(CMAKE_C_COMPILER_ENV_VAR "CC")
diff --git a/Modules/CMakeDetermineCXXCompiler.cmake b/Modules/CMakeDetermineCXXCompiler.cmake
index ffb8504a2..e88218922 100644
--- a/Modules/CMakeDetermineCXXCompiler.cmake
+++ b/Modules/CMakeDetermineCXXCompiler.cmake
@@ -185,7 +185,7 @@ endif()
 # configure all variables set in this file
 configure_file(${CMAKE_ROOT}/Modules/CMakeCXXCompiler.cmake.in
   ${CMAKE_PLATFORM_INFO_DIR}/CMakeCXXCompiler.cmake
-  @ONLY IMMEDIATE # IMMEDIATE must be here for compatibility mode <= 2.0
+  @ONLY
   )
 
 set(CMAKE_CXX_COMPILER_ENV_VAR "CXX")
diff --git a/Modules/CMakeDetermineCompilerId.cmake b/Modules/CMakeDetermineCompilerId.cmake
index 4087060b6..7fa45340c 100644
--- a/Modules/CMakeDetermineCompilerId.cmake
+++ b/Modules/CMakeDetermineCompilerId.cmake
@@ -164,7 +164,7 @@ Id flags: ${testflags}
     set(id_dir ${CMAKE_${lang}_COMPILER_ID_DIR})
     get_filename_component(id_src "${src}" NAME)
     configure_file(${CMAKE_ROOT}/Modules/CompilerId/VS-${v}.${ext}.in
-      ${id_dir}/CompilerId${lang}.${ext} @ONLY IMMEDIATE)
+      ${id_dir}/CompilerId${lang}.${ext} @ONLY)
     execute_process(
       COMMAND ${CMAKE_MAKE_PROGRAM} CompilerId${lang}.${ext} ${build}
       WORKING_DIRECTORY ${CMAKE_${lang}_COMPILER_ID_DIR}
@@ -202,7 +202,7 @@ Id flags: ${testflags}
       set(ext xcode)
     endif()
     configure_file(${CMAKE_ROOT}/Modules/CompilerId/Xcode-${v}.pbxproj.in
-      ${id_dir}/CompilerId${lang}.${ext}/project.pbxproj @ONLY IMMEDIATE)
+      ${id_dir}/CompilerId${lang}.${ext}/project.pbxproj @ONLY)
     unset(_ENV_MACOSX_DEPLOYMENT_TARGET)
     if(DEFINED ENV{MACOSX_DEPLOYMENT_TARGET})
       set(_ENV_MACOSX_DEPLOYMENT_TARGET "$ENV{MACOSX_DEPLOYMENT_TARGET}")
diff --git a/Modules/CMakeDetermineFortranCompiler.cmake b/Modules/CMakeDetermineFortranCompiler.cmake
index 10574b117..8e2065d95 100644
--- a/Modules/CMakeDetermineFortranCompiler.cmake
+++ b/Modules/CMakeDetermineFortranCompiler.cmake
@@ -222,6 +222,6 @@ endif()
 # configure variables set in this file for fast reload later on
 configure_file(${CMAKE_ROOT}/Modules/CMakeFortranCompiler.cmake.in
   ${CMAKE_PLATFORM_INFO_DIR}/CMakeFortranCompiler.cmake
-  @ONLY IMMEDIATE # IMMEDIATE must be here for compatibility mode <= 2.0
+  @ONLY
   )
 set(CMAKE_Fortran_COMPILER_ENV_VAR "FC")
diff --git a/Modules/CMakeDetermineJavaCompiler.cmake b/Modules/CMakeDetermineJavaCompiler.cmake
index ae9f5fcaf..7ae78562e 100644
--- a/Modules/CMakeDetermineJavaCompiler.cmake
+++ b/Modules/CMakeDetermineJavaCompiler.cmake
@@ -100,5 +100,5 @@ mark_as_advanced(CMAKE_Java_COMPILER)
 
 # configure variables set in this file for fast reload later on
 configure_file(${CMAKE_ROOT}/Modules/CMakeJavaCompiler.cmake.in
-  ${CMAKE_PLATFORM_INFO_DIR}/CMakeJavaCompiler.cmake IMMEDIATE @ONLY)
+  ${CMAKE_PLATFORM_INFO_DIR}/CMakeJavaCompiler.cmake @ONLY)
 set(CMAKE_Java_COMPILER_ENV_VAR "JAVA_COMPILER")
diff --git a/Modules/CMakeDetermineRCCompiler.cmake b/Modules/CMakeDetermineRCCompiler.cmake
index c4600c7fe..f23846e07 100644
--- a/Modules/CMakeDetermineRCCompiler.cmake
+++ b/Modules/CMakeDetermineRCCompiler.cmake
@@ -63,5 +63,5 @@ endif()
 
 # configure variables set in this file for fast reload later on
 configure_file(${CMAKE_ROOT}/Modules/CMakeRCCompiler.cmake.in
-               ${CMAKE_PLATFORM_INFO_DIR}/CMakeRCCompiler.cmake IMMEDIATE)
+               ${CMAKE_PLATFORM_INFO_DIR}/CMakeRCCompiler.cmake)
 set(CMAKE_RC_COMPILER_ENV_VAR "RC")
diff --git a/Modules/CMakeDetermineSystem.cmake b/Modules/CMakeDetermineSystem.cmake
index 3a95d2a6f..7756273a3 100644
--- a/Modules/CMakeDetermineSystem.cmake
+++ b/Modules/CMakeDetermineSystem.cmake
@@ -181,6 +181,6 @@ if(CMAKE_BINARY_DIR)
   # configure variables set in this file for fast reload, the template file is defined at the top of this file
   configure_file(${CMAKE_ROOT}/Modules/CMakeSystem.cmake.in
                 ${CMAKE_PLATFORM_INFO_DIR}/CMakeSystem.cmake
-                IMMEDIATE @ONLY)
+                @ONLY)
 
 endif()
diff --git a/Modules/CMakeExportBuildSettings.cmake b/Modules/CMakeExportBuildSettings.cmake
index a18f95062..90a7a8991 100644
--- a/Modules/CMakeExportBuildSettings.cmake
+++ b/Modules/CMakeExportBuildSettings.cmake
@@ -29,7 +29,7 @@ endif()
 macro(CMAKE_EXPORT_BUILD_SETTINGS SETTINGS_FILE)
   if(${SETTINGS_FILE} MATCHES ".+")
     configure_file(${CMAKE_ROOT}/Modules/CMakeBuildSettings.cmake.in
-                   ${SETTINGS_FILE} @ONLY IMMEDIATE)
+                   ${SETTINGS_FILE} @ONLY)
   else()
     message(SEND_ERROR "CMAKE_EXPORT_BUILD_SETTINGS called with no argument.")
   endif()
diff --git a/Modules/CMakeTestCCompiler.cmake b/Modules/CMakeTestCCompiler.cmake
index 2c751471a..d13304264 100644
--- a/Modules/CMakeTestCCompiler.cmake
+++ b/Modules/CMakeTestCCompiler.cmake
@@ -78,7 +78,7 @@ else()
   configure_file(
     ${CMAKE_ROOT}/Modules/CMakeCCompiler.cmake.in
     ${CMAKE_PLATFORM_INFO_DIR}/CMakeCCompiler.cmake
-    @ONLY IMMEDIATE # IMMEDIATE must be here for compatibility mode <= 2.0
+    @ONLY
     )
   include(${CMAKE_PLATFORM_INFO_DIR}/CMakeCCompiler.cmake)
 
diff --git a/Modules/CMakeTestCXXCompiler.cmake b/Modules/CMakeTestCXXCompiler.cmake
index a5cdf5669..a06c92a0f 100644
--- a/Modules/CMakeTestCXXCompiler.cmake
+++ b/Modules/CMakeTestCXXCompiler.cmake
@@ -71,7 +71,7 @@ else()
   configure_file(
     ${CMAKE_ROOT}/Modules/CMakeCXXCompiler.cmake.in
     ${CMAKE_PLATFORM_INFO_DIR}/CMakeCXXCompiler.cmake
-    @ONLY IMMEDIATE # IMMEDIATE must be here for compatibility mode <= 2.0
+    @ONLY
     )
   include(${CMAKE_PLATFORM_INFO_DIR}/CMakeCXXCompiler.cmake)
 
diff --git a/Modules/CMakeTestFortranCompiler.cmake b/Modules/CMakeTestFortranCompiler.cmake
index b9e77c5f5..b50e83276 100644
--- a/Modules/CMakeTestFortranCompiler.cmake
+++ b/Modules/CMakeTestFortranCompiler.cmake
@@ -98,7 +98,7 @@ else()
   configure_file(
     ${CMAKE_ROOT}/Modules/CMakeFortranCompiler.cmake.in
     ${CMAKE_PLATFORM_INFO_DIR}/CMakeFortranCompiler.cmake
-    @ONLY IMMEDIATE # IMMEDIATE must be here for compatibility mode <= 2.0
+    @ONLY
     )
   include(${CMAKE_PLATFORM_INFO_DIR}/CMakeFortranCompiler.cmake)
 
diff --git a/Modules/CPack.cmake b/Modules/CPack.cmake
index b0e965080..ccc36eb71 100644
--- a/Modules/CPack.cmake
+++ b/Modules/CPack.cmake
@@ -558,7 +558,7 @@ set(CPACK_COMPONENT_UNSPECIFIED_HIDDEN TRUE)
 set(CPACK_COMPONENT_UNSPECIFIED_REQUIRED TRUE)
 
 cpack_encode_variables()
-configure_file("${cpack_input_file}" "${CPACK_OUTPUT_CONFIG_FILE}" @ONLY IMMEDIATE)
+configure_file("${cpack_input_file}" "${CPACK_OUTPUT_CONFIG_FILE}" @ONLY)
 
 # Generate source file
 cpack_set_if_not_set(CPACK_SOURCE_INSTALLED_DIRECTORIES
@@ -578,4 +578,4 @@ set(CPACK_STRIP_FILES "${CPACK_SOURCE_STRIP_FILES}")
 
 cpack_encode_variables()
 configure_file("${cpack_source_input_file}"
-  "${CPACK_SOURCE_OUTPUT_CONFIG_FILE}" @ONLY IMMEDIATE)
+  "${CPACK_SOURCE_OUTPUT_CONFIG_FILE}" @ONLY)
diff --git a/Modules/CheckIncludeFile.cmake b/Modules/CheckIncludeFile.cmake
index 2d0edf9ec..9dc1648dd 100644
--- a/Modules/CheckIncludeFile.cmake
+++ b/Modules/CheckIncludeFile.cmake
@@ -48,7 +48,7 @@ macro(CHECK_INCLUDE_FILE INCLUDE VARIABLE)
     set(MACRO_CHECK_INCLUDE_FILE_FLAGS ${CMAKE_REQUIRED_FLAGS})
     set(CHECK_INCLUDE_FILE_VAR ${INCLUDE})
     configure_file(${CMAKE_ROOT}/Modules/CheckIncludeFile.c.in
-      ${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/CheckIncludeFile.c IMMEDIATE)
+      ${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/CheckIncludeFile.c)
     message(STATUS "Looking for ${INCLUDE}")
     if(${ARGC} EQUAL 3)
       set(CMAKE_C_FLAGS_SAVE ${CMAKE_C_FLAGS})
diff --git a/Modules/CheckIncludeFileCXX.cmake b/Modules/CheckIncludeFileCXX.cmake
index 7a86be5b1..fa36a3fd4 100644
--- a/Modules/CheckIncludeFileCXX.cmake
+++ b/Modules/CheckIncludeFileCXX.cmake
@@ -52,7 +52,7 @@ macro(CHECK_INCLUDE_FILE_CXX INCLUDE VARIABLE)
     set(MACRO_CHECK_INCLUDE_FILE_FLAGS ${CMAKE_REQUIRED_FLAGS})
     set(CHECK_INCLUDE_FILE_VAR ${INCLUDE})
     configure_file(${CMAKE_ROOT}/Modules/CheckIncludeFile.cxx.in
-      ${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/CheckIncludeFile.cxx IMMEDIATE)
+      ${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/CheckIncludeFile.cxx)
     message(STATUS "Looking for C++ include ${INCLUDE}")
     if(${ARGC} EQUAL 3)
       set(CMAKE_CXX_FLAGS_SAVE ${CMAKE_CXX_FLAGS})
diff --git a/Modules/CheckIncludeFiles.cmake b/Modules/CheckIncludeFiles.cmake
index 75bf27c33..182067f57 100644
--- a/Modules/CheckIncludeFiles.cmake
+++ b/Modules/CheckIncludeFiles.cmake
@@ -54,7 +54,7 @@ macro(CHECK_INCLUDE_FILES INCLUDE VARIABLE)
     set(CMAKE_CONFIGURABLE_FILE_CONTENT
       "${CMAKE_CONFIGURABLE_FILE_CONTENT}\n\nint main(){return 0;}\n")
     configure_file("${CMAKE_ROOT}/Modules/CMakeConfigurableFile.in"
-      "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/CheckIncludeFiles.c" @ONLY IMMEDIATE)
+      "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/CheckIncludeFiles.c" @ONLY)
 
     set(_INCLUDE ${INCLUDE}) # remove empty elements
     if("${_INCLUDE}" MATCHES "^([^;]+);.+;([^;]+)$")
diff --git a/Modules/CheckSymbolExists.cmake b/Modules/CheckSymbolExists.cmake
index eeac4c922..e1ca41255 100644
--- a/Modules/CheckSymbolExists.cmake
+++ b/Modules/CheckSymbolExists.cmake
@@ -72,7 +72,7 @@ macro(_CHECK_SYMBOL_EXISTS SOURCEFILE SYMBOL FILES VARIABLE)
       "${CMAKE_CONFIGURABLE_FILE_CONTENT}\nint main(int argc, char** argv)\n{\n  (void)argv;\n#ifndef ${SYMBOL}\n  return ((int*)(&${SYMBOL}))[argc];\n#else\n  (void)argc;\n  return 0;\n#endif\n}\n")
 
     configure_file("${CMAKE_ROOT}/Modules/CMakeConfigurableFile.in"
-      "${SOURCEFILE}" @ONLY IMMEDIATE)
+      "${SOURCEFILE}" @ONLY)
 
     message(STATUS "Looking for ${SYMBOL}")
     try_compile(${VARIABLE}
diff --git a/Modules/TestBigEndian.cmake b/Modules/TestBigEndian.cmake
index 675aaa373..6f32b0852 100644
--- a/Modules/TestBigEndian.cmake
+++ b/Modules/TestBigEndian.cmake
@@ -58,7 +58,7 @@ macro(TEST_BIG_ENDIAN VARIABLE)
 
     configure_file("${CMAKE_ROOT}/Modules/TestEndianess.c.in"
                    "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/TestEndianess.c"
-                    IMMEDIATE @ONLY)
+                   @ONLY)
 
      file(READ "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/TestEndianess.c"
           TEST_ENDIANESS_FILE_CONTENT)
diff --git a/Tests/CMakeLists.txt b/Tests/CMakeLists.txt
index d4a55fcc5..404b0fa36 100644
--- a/Tests/CMakeLists.txt
+++ b/Tests/CMakeLists.txt
@@ -2535,7 +2535,7 @@ ${CMake_BINARY_DIR}/bin/cmake -DVERSION=master -P ${CMake_SOURCE_DIR}/Utilities/
       configure_file(
         ${CMake_SOURCE_DIR}/Tests/TestInstall.sh.in
         ${CMake_BINARY_DIR}/Tests/TestShellInstall/TestInstall.sh
-        @ONLY IMMEDIATE
+        @ONLY
         )
       add_test(ShellInstall /bin/sh ${CMake_BINARY_DIR}/Tests/TestShellInstall/TestShellInstall.sh)
     endif()
diff --git a/Tests/CMakeTests/CMakeLists.txt b/Tests/CMakeTests/CMakeLists.txt
index 4c49c6a77..41714f672 100644
--- a/Tests/CMakeTests/CMakeLists.txt
+++ b/Tests/CMakeTests/CMakeLists.txt
@@ -3,7 +3,7 @@ set(CMAKE_EXECUTABLE "${CMake_BIN_DIR}/cmake")
 
 macro(AddCMakeTest TestName PreArgs)
   configure_file("${CMAKE_CURRENT_SOURCE_DIR}/${TestName}Test.cmake.in"
-    "${CMAKE_CURRENT_BINARY_DIR}/${TestName}Test.cmake" @ONLY IMMEDIATE)
+    "${CMAKE_CURRENT_BINARY_DIR}/${TestName}Test.cmake" @ONLY)
   add_test(NAME CMake.${TestName}
     COMMAND ${CMAKE_EXECUTABLE} ${PreArgs}
     -P "${CMAKE_CURRENT_BINARY_DIR}/${TestName}Test.cmake" ${ARGN})
diff --git a/Tests/Complex/CMakeLists.txt b/Tests/Complex/CMakeLists.txt
index 671114764..fcde44d7e 100644
--- a/Tests/Complex/CMakeLists.txt
+++ b/Tests/Complex/CMakeLists.txt
@@ -198,14 +198,14 @@ make_directory("${Complex_BINARY_DIR}/make_dir")
 configure_file(
   ${Complex_SOURCE_DIR}/Library/dummy
   ${Complex_BINARY_DIR}/Library/dummylib.lib
-  COPYONLY IMMEDIATE)
+  COPYONLY)
 foreach (ext ${CMAKE_SHLIB_SUFFIX};.so;.a;.sl
          ${CMAKE_SHARED_LIBRARY_SUFFIX}.2
          ${CMAKE_STATIC_LIBRARY_SUFFIX}.2)
   configure_file(
     ${Complex_SOURCE_DIR}/Library/dummy
     ${Complex_BINARY_DIR}/Library/libdummylib${ext}
-    COPYONLY IMMEDIATE)
+    COPYONLY)
 endforeach ()
 
 find_library(FIND_DUMMY_LIB
@@ -281,7 +281,7 @@ if (WIN32)
     configure_file(
       ${Complex_SOURCE_DIR}/Library/dummy
       "${dir}/${file}"
-      COPYONLY IMMEDIATE)
+      COPYONLY)
     exec_program(${CMAKE_COMMAND} ARGS "-E write_regv \"${hkey}\" \"${dir}\"")
     find_path(REGISTRY_TEST_PATH
       ${file}
diff --git a/Tests/ComplexOneConfig/CMakeLists.txt b/Tests/ComplexOneConfig/CMakeLists.txt
index 1abf45df5..a4a0e0e59 100644
--- a/Tests/ComplexOneConfig/CMakeLists.txt
+++ b/Tests/ComplexOneConfig/CMakeLists.txt
@@ -198,12 +198,12 @@ make_directory("${Complex_BINARY_DIR}/make_dir")
 configure_file(
   ${Complex_SOURCE_DIR}/Library/dummy
   ${Complex_BINARY_DIR}/Library/dummylib.lib
-  COPYONLY IMMEDIATE)
+  COPYONLY)
 foreach (ext ${CMAKE_SHLIB_SUFFIX};.so;.a;.sl)
   configure_file(
     ${Complex_SOURCE_DIR}/Library/dummy
     ${Complex_BINARY_DIR}/Library/libdummylib${ext}
-    COPYONLY IMMEDIATE)
+    COPYONLY)
 endforeach ()
 
 find_library(FIND_DUMMY_LIB
@@ -251,7 +251,7 @@ if (WIN32)
     configure_file(
       ${Complex_SOURCE_DIR}/Library/dummy
       "${dir}/${file}"
-      COPYONLY IMMEDIATE)
+      COPYONLY)
     exec_program(${CMAKE_COMMAND} ARGS "-E write_regv \"${hkey}\" \"${dir}\"")
     find_path(REGISTRY_TEST_PATH
       ${file}
diff --git a/Tests/CustomCommand/CMakeLists.txt b/Tests/CustomCommand/CMakeLists.txt
index ff96add02..240814119 100644
--- a/Tests/CustomCommand/CMakeLists.txt
+++ b/Tests/CustomCommand/CMakeLists.txt
@@ -170,7 +170,7 @@ add_custom_command(OUTPUT ${PROJECT_BINARY_DIR}/not_included.h
 configure_file(
   ${PROJECT_SOURCE_DIR}/config.h.in
   ${PROJECT_BINARY_DIR}/config.h
-  @ONLY IMMEDIATE
+  @ONLY
   )
 
 # add the executable
@@ -375,7 +375,7 @@ foreach(arg ${CHECK_ARGS} "")
 endforeach()
 configure_file(${CMAKE_CURRENT_SOURCE_DIR}/check_command_line.c.in
                ${CMAKE_CURRENT_BINARY_DIR}/check_command_line.c
-               @ONLY IMMEDIATE)
+               @ONLY)
 add_executable(check_command_line
   ${CMAKE_CURRENT_BINARY_DIR}/check_command_line.c)
 set(output_name "check_command_line")
diff --git a/Tests/MakeClean/CMakeLists.txt b/Tests/MakeClean/CMakeLists.txt
index 13348a28b..1308b615f 100644
--- a/Tests/MakeClean/CMakeLists.txt
+++ b/Tests/MakeClean/CMakeLists.txt
@@ -37,7 +37,7 @@ foreach(f ${TOCLEAN_FILES})
   set(CHECK_FILES "${CHECK_FILES}      \"${f}\",\n")
 endforeach()
 configure_file(${MakeClean_SOURCE_DIR}/check_clean.c.in
-               ${MakeClean_BINARY_DIR}/check_clean.c @ONLY IMMEDIATE)
+               ${MakeClean_BINARY_DIR}/check_clean.c @ONLY)
 add_executable(check_clean ${MakeClean_BINARY_DIR}/check_clean.c)
 
 # After the executable builds, clean the files.
diff --git a/Tests/MakeClean/ToClean/CMakeLists.txt b/Tests/MakeClean/ToClean/CMakeLists.txt
index 37d7292ce..089fd130c 100644
--- a/Tests/MakeClean/ToClean/CMakeLists.txt
+++ b/Tests/MakeClean/ToClean/CMakeLists.txt
@@ -40,4 +40,4 @@ list(APPEND TOCLEAN_FILES "${ToClean_BINARY_DIR}/toclean_copy${CMAKE_EXECUTABLE_
 
 # Configure a file listing these build-time-generated files.
 configure_file(${ToClean_SOURCE_DIR}/ToCleanFiles.cmake.in
-               ${ToClean_BINARY_DIR}/ToCleanFiles.cmake @ONLY IMMEDIATE)
+               ${ToClean_BINARY_DIR}/ToCleanFiles.cmake @ONLY)
diff --git a/Tests/RunCMake/CompilerChange/RunCMakeTest.cmake b/Tests/RunCMake/CompilerChange/RunCMakeTest.cmake
index d38371680..5bb2821d9 100644
--- a/Tests/RunCMake/CompilerChange/RunCMakeTest.cmake
+++ b/Tests/RunCMake/CompilerChange/RunCMakeTest.cmake
@@ -22,8 +22,8 @@ set(ccIn ${RunCMake_SOURCE_DIR}/cc.sh.in)
 set(cc1 ${RunCMake_BINARY_DIR}/cc1.sh)
 set(cc2 ${RunCMake_BINARY_DIR}/cc2.sh)
 set(cc3 CMAKE_C_COMPILER-NOTFOUND)
-configure_file(${ccIn} ${cc1} @ONLY IMMEDIATE)
-configure_file(${ccIn} ${cc2} @ONLY IMMEDIATE)
+configure_file(${ccIn} ${cc1} @ONLY)
+configure_file(${ccIn} ${cc2} @ONLY)
 
 # Use a single build tree for remaining tests without cleaning.
 set(RunCMake_TEST_BINARY_DIR ${RunCMake_BINARY_DIR}/ChangeCompiler-build)
diff --git a/Tests/Wrapping/CMakeLists.txt b/Tests/Wrapping/CMakeLists.txt
index 58e9c3242..1dc7ffc07 100644
--- a/Tests/Wrapping/CMakeLists.txt
+++ b/Tests/Wrapping/CMakeLists.txt
@@ -54,7 +54,7 @@ if (QT_FOUND AND QT_WRAP_UI)
 
 
   configure_file(${CMAKE_CURRENT_SOURCE_DIR}/foo.ui.in
-    ${CMAKE_CURRENT_BINARY_DIR}/foo.ui IMMEDIATE)
+    ${CMAKE_CURRENT_BINARY_DIR}/foo.ui)
 
   set (QT_WRAP_UI "On")
   set (QT_UIC_EXE "${QT_UIC_EXECUTABLE}")
@@ -102,6 +102,6 @@ add_dependencies(fakefluid Wrap)
 configure_file(
   ${Wrapping_SOURCE_DIR}/dummy
   ${Wrapping_BINARY_DIR}/gl.h
-  COPYONLY IMMEDIATE)
+  COPYONLY)
 use_mangled_mesa (${Wrapping_BINARY_DIR} ${Wrapping_BINARY_DIR}/mangled_mesa)
 
diff --git a/Utilities/cmcurl/CMake/CurlCheckCSourceCompiles.cmake b/Utilities/cmcurl/CMake/CurlCheckCSourceCompiles.cmake
index d025769aa..cfcf47bd6 100644
--- a/Utilities/cmcurl/CMake/CurlCheckCSourceCompiles.cmake
+++ b/Utilities/cmcurl/CMake/CurlCheckCSourceCompiles.cmake
@@ -45,8 +45,7 @@ MACRO(CURL_CHECK_C_SOURCE_COMPILES SOURCE VAR)
     SET(src "${src}\nint main() { ${SOURCE} ; return 0; }")
     SET(CMAKE_CONFIGURABLE_FILE_CONTENT "${src}")
     CONFIGURE_FILE(${CMAKE_CURRENT_SOURCE_DIR}/CMake/CMakeConfigurableFile.in
-      "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/src.c"
-      IMMEDIATE)
+      "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/src.c")
     MESSAGE(STATUS "Performing Test ${message}")
     TRY_COMPILE(${VAR}
       ${CMAKE_BINARY_DIR}
diff --git a/Utilities/cmcurl/CMake/CurlCheckCSourceRuns.cmake b/Utilities/cmcurl/CMake/CurlCheckCSourceRuns.cmake
index 19681bd85..1bd837a69 100644
--- a/Utilities/cmcurl/CMake/CurlCheckCSourceRuns.cmake
+++ b/Utilities/cmcurl/CMake/CurlCheckCSourceRuns.cmake
@@ -45,8 +45,7 @@ MACRO(CURL_CHECK_C_SOURCE_RUNS SOURCE VAR)
     SET(src "${src}\nint main() { ${SOURCE} ; return 0; }")
     SET(CMAKE_CONFIGURABLE_FILE_CONTENT "${src}")
     CONFIGURE_FILE(${CMAKE_CURRENT_SOURCE_DIR}/CMake/CMakeConfigurableFile.in
-      "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/src.c"
-      IMMEDIATE)
+      "${CMAKE_BINARY_DIR}${CMAKE_FILES_DIRECTORY}/CMakeTmp/src.c")
     MESSAGE(STATUS "Performing Test ${message}")
     TRY_RUN(${VAR} ${VAR}_COMPILED
       ${CMAKE_BINARY_DIR}
diff --git a/Utilities/cmlibarchive/build/cmake/CheckFuncs.cmake b/Utilities/cmlibarchive/build/cmake/CheckFuncs.cmake
index 0670df97f..84cc881e3 100644
--- a/Utilities/cmlibarchive/build/cmake/CheckFuncs.cmake
+++ b/Utilities/cmlibarchive/build/cmake/CheckFuncs.cmake
@@ -31,7 +31,7 @@ MACRO (CHECK_FUNCTION_EXISTS_GLIBC _FUNC _FUNCVAR)
      SET(CHECK_STUB_FUNC_1 "__stub_${_FUNC}")
      SET(CHECK_STUB_FUNC_2 "__stub___${_FUNC}")
      CONFIGURE_FILE( ${_selfdir_CheckFunctionExistsGlibc}/CheckFuncs_stub.c.in
-       ${CMAKE_CURRENT_BINARY_DIR}/cmake.tmp/CheckFuncs_stub.c IMMEDIATE)
+       ${CMAKE_CURRENT_BINARY_DIR}/cmake.tmp/CheckFuncs_stub.c)
      TRY_COMPILE(__stub
        ${CMAKE_CURRENT_BINARY_DIR}
        ${CMAKE_CURRENT_BINARY_DIR}/cmake.tmp/CheckFuncs_stub.c